Program Chair
- Stacey Bent, Stanford University, USA
Program Committee
- Robert Clark, TEL, USA
- Anuja DaSilva, IBM, USA
- Annelies Delabie, IMEC, Belgium (ASD 2016 Chair)
- John Ekerdt, University of Texas at Austin, USA
- Dennis Hausmann, Lam Research, USA
- Andrea Illiberi, ASM, Belgium (ASD 2019 Chair)
- Ravi Kanjolia, EMD Performance Materials, USA
- Erwin Kessels, Eindhoven University of Technology, The Netherlands
- Adrie Mackus, Eindhoven University of Technology, The Netherlands (ASD 2017 Chair)
- Gregory Parsons, North Carolina State University, USA (ASD 2018 Chair)
- Mark Saly, Applied Materials, USA
- Kavita Shah, Nova, USA
- Shashi Vyas, Intel, USA
- Rudy Wojtecki, IBM, USA